Intellectual property

A platform protected from chemistry to devices.

The MacEtch patent portfolio covers foundational porous-material formation, anisotropic nanostructuring, catalyst and process control, optical surfaces, microLED fabrication, and radiation-enabled systems.

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MacEtch portfolio

Foundations

Core composition and geometry claims that established the platform across semiconductor systems.

01 · APP. 09/662,682

Metal-assisted chemical etching porous silicon formation method

Inventors: Xiuling Li, Paul W. Bohn, Jonathan V. Sweedler

Issued 2004

02 · APP. 09/989,050

Metal-assisted chemical etching to produce porous Group III–V materials

Inventors: Paul W. Bohn, Xiuling Li, Jonathan V. Sweedler, Ilesanmi Adesida

Issued 2004

03 · APP. 13/062,130

Method of forming nanoscale three-dimensional patterns in a porous material

Inventors: Xiuling Li, David N. Ruzic, Ik Su Chun, Edmond K. C. Chow, Randolph E. Flauta

Issued 2013

04 · APP. 13/833,462

Metal-assisted chemical etching to produce III–V semiconductor nanostructures

Inventors: Xiuling Li, Matthew T. DeJarld, Parsian Mohseni, Jae Cheol Shin, Winston Chern

Issued 2015

05 · APP. 13/503,123

Method of forming an array of high-aspect-ratio semiconductor nanostructures

Inventors: Xiuling Li, Nicholas X. Fang, Placid M. Ferreira, Winston Chern, Ik Su Chun, Keng Hao Hsu

Issued 2015

Process control

Guidance · anchoring · vapor phase

06 · APP. 14/541,765

Apparatus and method for magnetic-field-guided metal-assisted chemical etching

Inventors: Xiuling Li, Weidong Zhou, Wen Huang

Issued 2017

07 · APP. 15/441,745

Self-anchored catalyst metal-assisted chemical etching

Inventors: Xiuling Li, Jeongdong Kim, Lingyu Kong, Munho Kim

Issued 2018

08 · APP. 15/712,498

Catalyst-assisted chemical etching with a vapor-phase etchant

Inventors: Xiuling Li, Jeongdong Kim

Issued 2019

11 · APP. 16/361,514

Catalyst-assisted chemical etching with a vapor-phase etchant

Inventors: Xiuling Li, Jeong Dong Kim, Dane J. Sievers, Lukas Janavicius

Issued 2020

Optoelectronics and devices

Optical surfaces · LEDs · microLEDs

09 · APP. 15/200,345

Optoelectronic device including a buried metal grating for extraordinary optical transmission

Inventors: Xiuling Li, Daniel Wasserman, Xiang Zhao

Issued 2019

10 · APP. 16/034,774

Optoelectronic device having an antireflective surface

Inventors: Xiuling Li, Munho Kim, Jeong Dong Kim

U.S. 10,741,705 · 2020

12 · APP. 18/124,132

Light-emitting-diode structures for a microLED device and method for producing an array

Inventors: Xiuling Li, Clarence Chan

Application

13 · APP. 63/913,398

Monolithic, one-pass MacEtch through semiconductor p–n junction stacks for microLED arrays

Inventors: Xiuling Li, Xihang Wu, Clarence Chan

Application

Radiation-enabled systems

X-ray and gamma-ray detection · radiation-enabled etching

14 · U.S. PROVISIONAL 64/146,220

Detector for X-rays or gamma rays

Inventors: Yong-Hang Zhang, Xiuling Li

Filed September 1, 2026

15 · U.S. PROVISIONAL 64/136,763

Radiation-enabled metal-assisted chemical etching (MacEtch) system and catalyst structure

Inventors: Xiuling Li, Yong-Hang Zhang

Filed August 19, 2026

This page summarizes the MacEtch portfolio. Status and bibliographic information should be confirmed against official patent-office records for legal or licensing decisions.

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